Vent Filter FBA Series
Significantly improved throughput.
This is a vent filter manufactured by Pureron Japan, used in semiconductor manufacturing equipment. In load lock chambers and transfer chambers, the generation of particles and transient turbulence during vacuum break can lead to particle adhesion and damage to wafers. Traditionally, this phenomenon was prevented by slowly introducing nitrogen gas through a slow vent; however, using Pureron's vent filter significantly improves throughput.
- Company：ピー・ジェイ
- Price：Other
